Plasma Cleaner

Process Chamber

• Plasma Mode : PE (Plasma Etching) Mode with single electrode
• Size : 140×200×110 (W×D×H, mm)
• Single Block Aluminum (Not welded, Minimized gas leak)
• Uniform gas flow design (Patent No. 10-1697205)

 Generator

• Frequency : 20~100kHz (10kHz increment)
• Power: Max. 100W (Adjustable in 1W increment)
• Automatic Impedance Matching
• Process Monitoring and Control

 Gas flow module

• Maximum Number of gas channels : ×3 lines
• Gas flow control : High repeatability MFC
• Purge line : ×1 ea
• Vent line : ×1 ea
• MFC Flow rate : Max.100 sccm (1 sccm increment)

Controller

• DSP on board signal controller
• Automatic / Manual operation
• Interactive integrated software
• 7” Touchscreen PC & USB data transfer
• Saving and loading of process recipes
• Process graphs and alarm log loading