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Expanded Plasma Cleaner
Our Expanded Cleaner is a larger tabletop plasma instrument with four times the capacity of the basic plasma cleaner, extensively used for nanoscale surface cleaning and surface activation.
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Features
Larger, tabletop unit
Adjustable RF power (Low, Medium, and High power settings)
Applies a maximum of 30W to the RF coil
Includes a 6" diameter x 6.5" length Pyrex chamber
Hinged door with viewing window
Active fan cooling
Integral switch for a vacuum pump
1/8" NPT metering valve to qualitatively control gas flow and chamber pressure
1/8" NPT 3-way valve to quickly switch from introducing gas, venting and isolating the chamber
Weight: 37 lbs
Size: 11" H x 18" W x 9" D
Optional PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of chamber pressure
Optional quartz chamber and sample tray
Compatible vacuum pump available
Requirements
Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (0.83 ft3/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less
For pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps.
For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps.
