Atomic Layer Deposition

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SAL1000 Atomic Layer Deposition Equipment

An affordable ALD equipment that is suitable for R&D and laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.

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Overview

  • Easy operation, user friendly
  • With minimal configuration to deposit one kind of film
  • Deposition test available with the demo system
  • Deposition distribution with higher quality
  • Easy software operation even on a small display
  • Substrate rotation function
  • Portable design