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Semi-Automated Probe Station SPS-2600

MicroXact’s semi-automated probe stations, designed to be flexible and easy to use when performing high productivity device characterization, wafer level reliability testing and failure analysis.

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Overview

Features:

  • Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option.
  • Stepper motor-based, no encoders.
  • Very cost competitive
  • Highly recommended in applications where sub-0°C testing or shielding is desired
  • Options available: heated or cooled chucks, zoom scopes or compound microscopes, various shielding, selection of the chucks for DC and RF measurements, and many more