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SEV2000Plus Vapor Deposition Equipment
Small evaporation system for R&D, for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
WhatsappOverview
- Space saving system
- Deposition of substrates up to Ø 100mm
- Deposition of various size of substrate is possible with special trays
- Easy setting of the substrate tray by a front hatch and automated chucking mechanism
- Expandable with Sputter, ALD and Anneal Systems of Plus series.
