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SK-FTM Compact Thickness Film Monitor
Compact film thickness monitor is a small and highly accurate reflective spectroscopic film thickness meter that uses a reflective probe with excellent optical properties. It also can be used as an in-line monitoe during the process or as an end-point detection sensor.
WhatsappOverview
- Compact probe with optical fiber.
- Good repeatability of the film thickness measurement 0.1nm ( 3 α ).
- Multilayer film thickness measurement up to 9 layers.
- Material analysis function such as evaluation of mixing ratio of the composite, Crystallinity Analysis and Analysis of the optical constant.
- Various selection of light source options.
- Wireless option for remote control and monitor.
- Film thickness end point detection software included.
- Automatic mapping stage available as options.
