Spin Coater

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Spin Coater POLOS200 Advanced

POLOS Advanced 200 are suitable for processing fragments of Ø 200 mm / 8 inch wafers (or Ø 260 mm substrates), or 6"x6" square substrates.

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Overview

The POLOS 200 spin coaters can be manual or optional semi-automatic chemical dispense with clear/transparent flat top lid, with center hole. Seamless full-plastic housing in Natural Polypropylene. For fragments and substrates up to Ø200 (or 8”) or 6" x 6".

Coating, Etching, Cleaning, Drying, Developing

Compatible with advanced option such as:
- backside rinsing
- automatic lid opening
- up to 16 digital I/O and 4 analog I/O

Includes a FREE vacuum chuck