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UV Nanoimprint System EZI PL400/600
EZImprinting is a super-high yield (> 99 %) nanoimprint lithography platform with sub-10 nm resolution and one-step Auto Release™ function.
WhatsappOverview
Advantages of the PL400/600 Nanoimprint Systems:
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Full-wafer imprinting – 6 inch PL600, 4 inch PL400
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Sub-10 nm resolution with 99% yield
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One step auto-release function preventing mold/substrate damage
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Supports both hard and soft molds of various types
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Variable mold and substrate sizes
- Programmable PLC with touch-screen user interface
