Deposition Techniques - Agus

SAL1000 Atomic Layer Deposition Equipment

SAL1000 Atomic Layer Deposition Equipment

An affordable ALD equipment that is suitable for R&D and laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
SAL3000 Atomic Layer Deposition Equipment

SAL3000 Atomic Layer Deposition Equipment

A space saving ALD equipment with substantial functions that is suitable for R&D and laboratory use to realize the precise step coverage deposition for uniform coating of each atomic layers.
SEV2000Plus Vapor Deposition Equipment

SEV2000Plus Vapor Deposition Equipment

Small evaporation system for R&D, for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
SSP1000 Atomic Layer Deposition Equipment

SSP1000 Atomic Layer Deposition Equipment

Affordable desktop type RF sputtering equipment with changeable deposition direction.
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