Basic Plasma Cleaner

Features

Compact, tabletop unit 
Adjustable RF power (Low, Medium, and High power settings) 
Applies a maximum of 18W to the RF coil 
Includes a 3" diameter x 6.5" length Pyrex chamber 
Hinged door with viewing window 
Active fan cooling 
1/8" NPT metering valve to qualitatively control gas flow and chamber pressure 
1/8" NPT 3-way valve to quickly switch from introducing gas, venting, and isolating the chamber 
Weight: 13 lbs 
Size: 8.5" H x 10" W x 8" D

Optional PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of chamber pressure
Optional quartz chamber and sample tray
Compatible vacuum pump available

Requirements

Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (0.83 ft3/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less
For pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps.
For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps.