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Material Science & Nanotechnology
Probe Station
Manual Probe Station SPS-1000
Small, ergonomic, and convenient to use, this system is ideal for laboratory testing and characterization of semiconductor devices and circuits.
Brand: Microxact
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Warranty Details
FEATURES
- Manual stage assembly is available with additional preload slide for easy loading and unloading of wafers or samples.
- Manual control of platen and chuck Z-position with coarse and fine adjustments.
- Smooth cast steel platen holds up to 10 magnetic or vacuum-based positioners.
- Coaxial and triaxial chucks as well as enclosures are available for low leakage current testing.
- Standard boom mount assembly for full-range XYZ positioning of microscope.
- Available high-resolution micropositioners with 80TPI screws for μm-level positioning of probes
Specification :
| Wafer Size | Up to 150mm standard, larger capacity available |
| XY Stage | |
| Travel | 100mmx100mm or 150mmx150mm standard, larger available |
| Resolution | 3µm standard, 2 µm optional |
| Platen | |
| Travel | 12.7 mm or more |
| Adjustment | Coarse and fine control, better than +/-1.5µm repeatability |
| Planarity | <+/-12.7µm across 150 mm, <+/-5µm across 150 mm optional |
| Rigidity | <5µm for 4.5 kg |
| Chuck | |
| Vacuum | Three-zone vacuum |
| Flatness | +/- 13 µm standard, down to +/- 3 µm optional |
| Breakdown Voltage | At least 500 V |
| Isolation | At least 1GigaOhm |
| Adjustment | 360° coarse, +/-6° fine |
| Fie Z adjustment | 10mm with 1?m or better resolution |
| Microscope | High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X |
| Electrical | |
| Terminals | BNC, Triax, RF, or Banana plug |
| Facility Requirements | |
| Vacuum | <600 torr |
| CDA | 60psi |
