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Rapid Nano-Patterning

UV Nanoimprint System EZI PL400/600

UV Nanoimprint System EZI PL400/600

EZImprinting is a super-high yield (> 99 %) nanoimprint lithography platform with sub-10 nm resolution and one-step Auto Release™ function.
Pricing & Availability Download Catalogue NIL Technology
Brand: NIL Technology
Contact Us for better pricing. Warranty Details

Advantages of the PL400/600 Nanoimprint Systems:

  • Full-wafer imprinting – 6 inch PL600, 4 inch PL400

  • Sub-10 nm resolution with 99% yield

  • One step auto-release function preventing mold/substrate damage

  • Supports both hard and soft molds of various types

  • Variable mold and substrate sizes

  • Programmable PLC with touch-screen user interface
Specification :
Control box operating pressure 45 psi standard
Control box vacuum < -14 psi
LED light source 70-100 psi
Filtered pressure source < -14 psi
Vacuum source 110-220V, 50/50Hz
Power Class 1000 or better
Cleanroom class 17
Stage 6
Touchscreen controller 17
Electronic control box 11
LED UV light source
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