The EP4, our latest generation of imaging ellipsometers, combines ellipsometry and microscopy. This enables the characterization of thickness and refractive index with the sensitivity of ellipsometry on micro-structures as small a...
The i4 is a state-of-the-art active vibration isolation system. It is ideal for isolating high-resolution measurement equipment from building vibrations and other disturbances, while providing active compensation in all six degree...